Maximized aspect ratio for custom applications

Overview

Carbon Design Innovations’ (CDI) carbon core high-aspect ratio probes (CCHAR) for atomic force microscopy (AFM) start with a core carbon nanotube (CNT) that is further processed and stabilized with patented technology resulting in a CNT probe with maximum aspect ratio, resolution, imaging lifetime and stability.

The CCHAR high-aspect ratio CNT AFM probes, are designed for critical dimension measurements and imaging high-Z structures in materials science, metrology and life science applications. The standard CNT probe length is approximately 1µm overall with < 500nm of exposed CNT tip. These two dimensions can also be custom engineered to user specifications.

The CDI Difference

Carbon Nanotube (CNT) probes can offer more robust material properties than traditional silicon probes. CDI CNT probes are not brittle and do not wear down as rapidly as silicon probes allowing for greater than 10x longer imaging lifetime. CCHAR probes have true multiwalled carbon nanotubes (MWCNTs), that are securely mounted, perfectly straight, and normal to the imaging surface. MWCNTs assure the probe is extremely tough. CDI’s proprietary processes securely attach the CNT to the cantilever and re-enforce the base attachment to ensure the CNT is firmly mounted. CDI technology allows the manufacture of probes with all the advantages of a CNT tip and the stability and familiarity of a silicon cantilever.

The physically robust material properties allow CNT probes to be able to withstand AFM imaging forces with a higher length-to-width ratio than is possible with a silicon or amorphous carbon spike probe. CDI’s patented processing techniques provide precise angle and length control that results in nanoengineered critical dimension probes for high-aspect ratio imaging applications.

Benefits

• Stabilized, robust CNT probe with maximized aspect ratio
• High-resolution CNT tip with the convenience of a silicon cantilever
• Enables imaging of critical dimension trench or hole structures with high-Z dimension variation
• Longer lifetime allows users compare samples with the same probe with no loss of resolution
• Reduced breakage, wear and contamination
• Precise length, diameter and angle deliver consistent probe-to-probe results

Features

• Overall CNT length: 1µm, Exposed CNT length: <500nm
• Proprietary stabilization coatings
• Imaging lifetime >10x that of silicon probes
• Custom length, aspect ratio and angles available
• Available on any cantilever of your choice. CDI uses Applied Nanostructures
  ANSCM-PT for its standard cantilever.

CCHAR Cantilever Characteristics

• CNT diameter is nominally 25nm
• Effective radius of curvature nominally 10nm (unsharpened)
• Aspect Ratio > 10:1
• Angular Displacement nominally 0º
• Variable spring constants available

Customization

CDI’s high-aspect ratio probes are widely applicable for most non-contact (tapping) mode AFM applications. Proprietary coatings and other custom processes are available.

Talk to us about customizing a tip set for your specialized application.

Applications

• Critical dimension measurement
• Metrology
• Force modulation microscopy

Deep-trench detail using CNT AFM Probe

Actual AFM Data of 90nm trench structure showing comparison data between a standard silicon probe and a CNT AFM Probe.

CCHAR Data Sheet in PDF format