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Metrology

Deep-Trench Images of 90nm Trench Structure using standard Si and C|D|I CNT AFM Probe

 
   

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The CCHAR high-aspect ratio CNT AFM probes, are designed for critical dimension measurements and imaging high-Z structures in materials science, metrology and life science applications. The standard CNT probe length is approximately 1µm overall with < 500nm of exposed CNT tip. These two dimensions can also be custom engineered to user specifications.

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Deep Trench Image of 90 nm Trench Structure (pdf)

 
     
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